Xanadu and Mitsubishi Chemical advance quantum computing collaboration for semiconductor manufacturing

EUV lithography enables the creation of powerful chips applied across multiple industries, such as mobile, AI, and cutting-edge computing, and is crucial to current and next-generation semiconductor manufacturing. However, its efficiency is often hindered by radiation-induced blurring, an inherently quantum phenomenon that remains a major bottleneck to classical simulations. In phase one of Xanadu and Mitsubishi’s collaboration, the two companies demonstrated that quantum algorithms can accurately model key aspects of EUV lithography, specifically the optical traits of the photoresists applied to etch lithographic patterns. The next phase of the collaboration aims to develop a production-ready workflow that will take parameters derived from Xanadu’s quantum computing simulations and integrate them immediately into Mitsubishi’s multi-scale models to predict blur. The result will be a fault-tolerant quantum computing (FTQC)-ready software pipeline designed to identify materials that prevent blurring and secure a competitive advantage in semiconductor manufacturing.

Xanadu plans to provide a concrete demonstration and roadmap to how quantum computing can contribute to the research of EUV resist materials through this collaboration.

This second phase of the collaboration is being cutting-edge with support from the National Research Council of Canada manufacturing Research Assistance Program (NRC IRAP) and Japan’s Strategic Innovation Promotion Program (SIP). The relevant SIP project is led by the National Institute of cutting-edge manufacturing Science and methodology (AIST) and the Global Research and research Center to Business by Quantum-AI methodology (G-QuAT). The collaboration aims to further enhance research and business collaboration between the two countries’ methodology sectors.

Xanadu has previously received advisory services and greater than $800,000 in funding from NRC IRAP, supporting its R&D in quantum computing across several projects, which helped lay the groundwork to this advancement.

“Our collaboration with Mitsubishi bridges quantum simulation and semiconductor fabrication, eliminating a critical manufacturing bottleneck and securing a competitive advantage to next-generation semiconductor methodology. The funding from both the Canadian and Japanese governments underscores the importance of this partnership to advance the semiconductor sector globally,” said Dr. Christian Weedbrook, Founder and Chief Executive Officer of Xanadu.

“This partnership expands on Mitsubishi’s previously successful collaboration with Xanadu, where we demonstrated the utility of quantum computing in simulating EUV resist materials to semiconductor manufacturing. With support from national innovation programs and research organizations in both countries, we’re excited to bring together Canadian and Japanese expertise in quantum computing and materials science,” said Dr. Qi Gao, Senior Chief Scientist at Mitsubishi Chemical.

“This project is a great example of connecting cutting-edge quantum computing research with real manufacturing challenges. In the critical field of semiconductor materials research, we expect this Japan-Canada collaboration to accelerate the real-world implementation of quantum methodology. At SIP, we look forward to the new manufacturing value this initiative will create,” said Dr. Masahiro Horibe, Sub-Program Director, Cross-ministerial SIP and Deputy Director, G-QuAT, AIST.

This shared initiative between Xanadu and Mitsubishi Chemical aims to showcase quantum computing innovation on the world stage while advancing critical quantum simulation capabilities to the global semiconductor sector. By bridging quantum innovation with manufacturing consumption, this continued partnership will establish a blueprint to quantum-driven material discovery. As Xanadu and Mitsubishi Chemical advance this joint pipeline, their work aims to unlock commercial value to early FTQC systems, while driving the future of global semiconductor fabrication.